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Title:
縦型熱処理装置
Document Type and Number:
Japanese Patent JP4393009
Kind Code:
B2
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Inventors:
牧谷 敏幸
斎藤 孝規
滝澤 剛
アイクマン 香留樹
Application Number:
JP2001100031A
Publication Date:
January 06, 2010
Filing Date:
March 30, 2001
Export Citation:
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Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/46; H01L21/205; F27B5/18; H01L21/22; H01L21/31; H01L21/324
Domestic Patent References:
JP3109722A
JP2002110556A
Attorney, Agent or Firm:
大井 正彦