真空紫外光装置および残留放射能の利用方法

Title:

真空紫外光装置および残留放射能の利用方法

Document Type and Number:

Japanese Patent JP4393059

Kind Code:

B2

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Inventors:

Etsuo Noda
Kiyoshi Hashimoto
Yasuyuki Okuda
Kazuo Hayashi

Application Number:

JP2002366845A

Publication Date:

January 06, 2010

Filing Date:

December 18, 2002

Export Citation:

Assignee:

Toshiba Corporation

International Classes:

B01J19/12; G21H3/00; G21H3/02; G21K5/00; G21K5/02

Domestic Patent References:

Attorney, Agent or Firm:

Toshio Kanata
Yoshiaki Inomata
Hiroko Inomata

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