Title:
成膜装置
Document Type and Number:
Japanese Patent JP4393897
Kind Code:
B2
Abstract:
A film forming apparatus which can perform a film forming process to a base material while the base material is being mounted on a die for a molding process. The film forming apparatus is provided with a cylinder-shaped frame body (1h) having one end closed with a bottom part and the other end opened, a target (1a) arranged on an inner plane of the bottom part, and a port (3b) formed to penetrate a wall part of the frame body (1h).
Inventors:
Nobuo Yoneyama
Takashi Nakayama
Shiro Takigawa
Takao Umezawa
Ishizawa Shisuke
Hiroshi Takano
Takashi Nakayama
Shiro Takigawa
Takao Umezawa
Ishizawa Shisuke
Hiroshi Takano
Application Number:
JP2004070524A
Publication Date:
January 06, 2010
Filing Date:
March 12, 2004
Export Citation:
Assignee:
ShinMaywa Industries,Ltd.
Oshima Electric Co., Ltd.
Oshima Electric Co., Ltd.
International Classes:
C23C14/34
Domestic Patent References:
| JP931642A |
Attorney, Agent or Firm:
Yoshihiro Tsunoda
Yasu Furukawa
Yasu Furukawa