Title:
検査装置
Document Type and Number:
Japanese Patent JP4397209
Kind Code:
B2
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Inventors:
Atsushi Takahashi
Application Number:
JP2003354716A
Publication Date:
January 13, 2010
Filing Date:
October 15, 2003
Export Citation:
Assignee:
ISHIDA CO.,LTD.
International Classes:
G01G23/00; G01B3/02; G01G11/00
Domestic Patent References:
| JP8027209B2 | ||||
| JP2003285910A | ||||
| JP2002337826A | ||||
| JP2003177054A | ||||
| JP56025773A | ||||
| JP11211402A | ||||
| JP8219996A | ||||
| JP2002043793A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita