Title:
微小部品貼り合わせ装置及び微小部品貼り合わせ方法
Document Type and Number:
Japanese Patent JP4398297
Kind Code:
B2
Inventors:
Mikio Nakamura
Toru Kuboi
Toru Kuboi
Application Number:
JP2004134374A
Publication Date:
January 13, 2010
Filing Date:
April 28, 2004
Export Citation:
Assignee:
Olympus Endo Technology America Inc.
International Classes:
H01L21/60
Domestic Patent References:
| JP10163277A | ||||
| JP2005259916A | ||||
| JP2000124232A |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Sadao Muramatsu
Tetsuya Kazama
Satoshi Kono
Sadao Muramatsu
Tetsuya Kazama