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Patent Searching and Data


Title:
基板処理装置
Document Type and Number:
Japanese Patent JP4399222
Kind Code:
B2
Inventors:
谷山 智志
市村 悟
吉田 秀成
Application Number:
JP2003334649A
Publication Date:
January 13, 2010
Filing Date:
September 26, 2003
Export Citation:
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Assignee:
株式会社日立国際電気
International Classes:
F27B5/14; F27B5/04; H01L21/31
Domestic Patent References:
JP9097767A
JP7142418A
JP8124869A
JP3291917A
JP5215463A
JP63200329U
JP7201767A
JP2002009008A
JP11283928A
JP8045921A
Attorney, Agent or Firm:
特許業務法人アイ・ピー・エス



 
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