Title:
同軸プローブ
Document Type and Number:
Japanese Patent JP4402259
Kind Code:
B2
More Like This:
| JP4664334 | Inspection methods |
| WO/2021/179077 | COUPLING PROBE FOR MICRO DEVICE INSPECTION |
Inventors:
Shinichi Koike
Application Number:
JP2000161345A
Publication Date:
January 20, 2010
Filing Date:
May 31, 2000
Export Citation:
Assignee:
Hioki Electric Co., Ltd.
International Classes:
G01R1/067; G01R27/02
Domestic Patent References:
| JP6003371A | ||||
| JP4265863A | ||||
| JP58128717A | ||||
| JP58063737U | ||||
| JP8233860A |
Attorney, Agent or Firm:
Shinji Sakai