Title:
半導体装置
Document Type and Number:
Japanese Patent JP4403292
Kind Code:
B2
Inventors:
Yuichi Harada
Naoki Kumagai
Hiroshi Kanamaru
Takuhiro Ikura
Ryu Saito
Naoki Kumagai
Hiroshi Kanamaru
Takuhiro Ikura
Ryu Saito
Application Number:
JP2004027173A
Publication Date:
January 27, 2010
Filing Date:
February 03, 2004
Export Citation:
Assignee:
Fuji Electric Device Technology Co., Ltd.
International Classes:
H01L21/822; H01L27/04
Domestic Patent References:
| JP2002016254A | ||||
| JP2000174217A | ||||
| JP10303436A | ||||
| JP61058262A |
Attorney, Agent or Firm:
Yoichi Matsumoto