Title:
蒸着装置及び蒸着方法
Document Type and Number:
Japanese Patent JP4405972
Kind Code:
B2
Inventors:
Kim Han Ki
Xu Akira
Kim Akira
Lee
Zheng Xin Jian
Xu Akira
Kim Akira
Lee
Zheng Xin Jian
Application Number:
JP2006007723A
Publication Date:
January 27, 2010
Filing Date:
January 16, 2006
Export Citation:
Assignee:
Samsung Mobile Display Co., Ltd.
International Classes:
H01L21/31; C23C16/48
Domestic Patent References:
| JP6188203A | ||||
| JP1196837A | ||||
| JP2005500674A |
Attorney, Agent or Firm:
Hatta International Patent Corporation