To realize high resolution observation of electron source structural change while monitoring field emission property with high precision.
A counterelectrode, linearly movable on an axis of the test piece until coming into contact with the test piece is provided in a position facing the test piece emitting electrons and a mean to apply voltage between the test piece and the countereletrode is provided in the test piece holder for electron microscope. The test piece holder for the electron microscope is provided with the surface of the counterelectrode facing the test piece as an approximate flat surface constituted from material with low production rate for secondary electrons. The test piece holder for electron microscope is provided with the counterelectrode which is the approximate flat surface with the surface facing the test piece constituted from the material with the low production rate of secondary electrons, or a hollow body provided with an opening part on one part of the approximate flat surface with the counterelectrode with at least one part of an inner wall of the hollow body constituted from material with low production rate for secondary electrons and a mechanism to cool the test piece.
COPYRIGHT: (C)2005,JPO&NCIPI
日▲高▼ 貴志夫
Mitsuo Hayashibara
Kazuyoshi Todoroki
Takeo Ueno
Sunakozawa adult
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