Title:
ホルダ搬送機構
Document Type and Number:
Japanese Patent JP4410218
Kind Code:
B2
Inventors:
Taihei Takahashi
Application Number:
JP2006153458A
Publication Date:
February 03, 2010
Filing Date:
June 01, 2006
Export Citation:
Assignee:
Eiko Engineering Co., Ltd.
International Classes:
H01L21/677; B65G49/06; B65G49/07; C23C14/56
Domestic Patent References:
| JP4029351A | ||||
| JP7011287U | ||||
| JP11254364A | ||||
| JP7266273A | ||||
| JP5162814A |
Attorney, Agent or Firm:
Kazuyoshi Hojo