Title:
ターボ分子ポンプ駆動装置
Document Type and Number:
Japanese Patent JP4411698
Kind Code:
B2
Inventors:
Tomoo Ota
Application Number:
JP23190299A
Publication Date:
February 10, 2010
Filing Date:
August 18, 1999
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
F04D27/00; F04D19/04; H02M7/493; H02P5/74
Domestic Patent References:
| JP10054369A | ||||
| JP10159786A | ||||
| JP5329208A | ||||
| JP6169989A | ||||
| JP10227293A | ||||
| JP10002293A |
Attorney, Agent or Firm:
Toshifumi Kita
Hiroyuki Eguchi
Hiroyuki Eguchi