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Patent Searching and Data


Title:
熱処理装置および熱処理装置の洗浄方法
Document Type and Number:
Japanese Patent JP4421238
Kind Code:
B2
Inventors:
野崎 仁秀
Application Number:
JP2003300683A
Publication Date:
February 24, 2010
Filing Date:
August 26, 2003
Export Citation:
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Assignee:
大日本スクリーン製造株式会社
International Classes:
F27B17/00; H01L21/26; F27B5/14; F27D5/00; F27D11/00; F27D11/02; F27D17/00; H01L21/00
Domestic Patent References:
JP2003173983A
JP2003133250A
Attorney, Agent or Firm:
吉竹 英俊
有田 貴弘