Title:
半導体装置
Document Type and Number:
Japanese Patent JP4423461
Kind Code:
B2
Inventors:
Yuichi Harada
Naoki Kumagai
Shinichi Jimbo
Takuhiro Ikura
Takahiro Sato
Naoki Kumagai
Shinichi Jimbo
Takuhiro Ikura
Takahiro Sato
Application Number:
JP2003294699A
Publication Date:
March 03, 2010
Filing Date:
August 18, 2003
Export Citation:
Assignee:
Fuji Electric Systems Co., Ltd.
International Classes:
H01L27/06; H01L29/78; H01L29/786
Domestic Patent References:
| JP2002158353A | ||||
| JP10321853A | ||||
| JP2002026314A | ||||
| JP2001298184A | ||||
| JP7283409A | ||||
| JP2004031519A |
Attorney, Agent or Firm:
Akinori Sakai