Title:
半導体搭載用配線基板の製造方法、及び半導体装置の製造方法
Document Type and Number:
Japanese Patent JP4429280
Kind Code:
B2
More Like This:
Inventors:
Hideya Murai
Naonori Shimodo
Takuo Funaya
Katsutoshi Kikuchi
Shintaro Yamado
Kazuhiro Baba
Koichi Honda
Keiichiro
Koji Matsui
Shinichi Miyazaki
Naonori Shimodo
Takuo Funaya
Katsutoshi Kikuchi
Shintaro Yamado
Kazuhiro Baba
Koichi Honda
Keiichiro
Koji Matsui
Shinichi Miyazaki
Application Number:
JP2006068413A
Publication Date:
March 10, 2010
Filing Date:
March 13, 2006
Export Citation:
Assignee:
NEC
NEC Electronics Corporation
NEC Electronics Corporation
International Classes:
H01L23/12
Domestic Patent References:
JP6296081A | ||||
JP5037159A | ||||
JP2002026171A | ||||
JP2004186265A | ||||
JP2003017834A | ||||
JP2000277889A |
Attorney, Agent or Firm:
Kimura Mitsuru