To shorten the tact time of a treatment operation for supplying treatment liquid on a substrate to be treated in a spinless system, and to form the application film of the treatment liquid on the substrate to be treated with uniform film thickness in a floating conveyance system.

When the fluctuation of the vacuum pressure of a vacuum mechanism used for stabilizing floating force is generated, the fluctuation of the vacuum pressure is detected through a pressure sensor by the control circuit of a nozzle height position corrector, and a control signal having fixed response characteristics to the fluctuation of the vacuum pressure is generated, and the driving of a piezoelectric actuator is controlled, and the height position of a resist nozzle is variably controlled according to displacement generated by the piezoelectric actuator. Thus, when a substrate G is displaced upward more than set floating altitude Hb according to the fluctuation of the vacuum pressure of the vacuum mechansim, a resist nozzle 78 is also displaced upward by almost the same displacement quantity in the same timing as that of the displacement of the substrate G, and a gap S between the resist nozzle 78 and the substrate G is held at a set value as a result.

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