Title:
エッチング装置
Document Type and Number:
Japanese Patent JP4433614
Kind Code:
B2
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Inventors:
Kiyoshi Kishimoto
Application Number:
JP2001009282A
Publication Date:
March 17, 2010
Filing Date:
January 17, 2001
Export Citation:
Assignee:
ソニー株式会社
International Classes:
H01L21/3065; H05H1/46; B01J19/08; H01L21/302
Domestic Patent References:
| JP9022797A | ||||
| JP8203694A | ||||
| JP11026563A | ||||
| JP7230959A |
Attorney, Agent or Firm:
Shinto International Patent Office