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Title:
熱処理炉及びその製造方法
Document Type and Number:
Japanese Patent JP4445519
Kind Code:
B2
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Inventors:
小林 誠
中尾 賢
Application Number:
JP2007146733A
Publication Date:
April 07, 2010
Filing Date:
June 01, 2007
Export Citation:
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Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/31; F27B5/14; F27D11/02; H01L21/22; H05B3/06; H05B3/66
Domestic Patent References:
JP8064546A
JP2007088325A
Foreign References:
WO2007023855A1
Attorney, Agent or Firm:
絹谷 信雄
金坂 憲幸



 
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