Title:
超純水製造装置
Document Type and Number:
Japanese Patent JP4447126
Kind Code:
B2
Inventors:
Tsugu Abe
Katsumi Yamamoto
Katsumi Yamamoto
Application Number:
JP2000208588A
Publication Date:
April 07, 2010
Filing Date:
July 10, 2000
Export Citation:
Assignee:
Nomura Micro Science Co., Ltd.
International Classes:
C02F1/32; B01D61/14; C02F1/42
Domestic Patent References:
| JP61011990U | ||||
| JP1172394U | ||||
| JP58042568U | ||||
| JP9029251A | ||||
| JP61015786A |
Attorney, Agent or Firm:
Saichi Suyama