Title:
ターボ分子ポンプ
Document Type and Number:
Japanese Patent JP4447684
Kind Code:
B2
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Inventors:
Takashi Otaki
Takahiro Matsumoto
Tomoaki Okamura
Takahiro Matsumoto
Tomoaki Okamura
Application Number:
JP607999A
Publication Date:
April 07, 2010
Filing Date:
January 13, 1999
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
F04D19/04
Domestic Patent References:
| JP514596U | ||||
| JP60135694A | ||||
| JP166495U | ||||
| JP1113191U | ||||
| JP63154891A | ||||
| JP1190990A | ||||
| JP10299689A |
Attorney, Agent or Firm:
Toshifumi Kita
Hiroyuki Eguchi
Hiroyuki Eguchi