To provide an element mapping device whereby an element mapping image can be easily obtained.
An electron beam transmitting through an object 5 to be analyzed in this scanning transmission electron microscope enters the element mapping device. The transmitted electron beam is subjected to energy spectral analysis by a spectroscope 11 to obtain an electron energy loss spectrum. Window information used for the accelerating voltage data of each element and a two window method is prepared in advance in a data base 24, and even if the element to be analyzed is changed, a two dimensional element distribution image is immediately confirmed. Since all of the electron beam entering the spectroscope pass through an object point 10, an aberration distortion can be made small, and energy stability becomes excellent. Therefore, the drift of the energy loss spectrum lessens, and a precise element distribution can be obtained.
COPYRIGHT: (C)2004,JPO&NCIPI
Kazuhiro Ueda
Koji Kimoto
Takashi Aoyama
Shunriku Taya
Sunakozawa adult
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