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Title:
鉛含有圧電膜およびその作製方法、鉛含有圧電膜を用いる圧電素子、ならびにこれを用いる液体吐出装置
Document Type and Number:
Japanese Patent JP4452752
Kind Code:
B2
Abstract:

To provide a lead-added piezoelectric film ensuring small deflection in hysteresis property and nonlinearity in comparison with the existing film, having excellent characteristics for a large piezoelectric constant in the positive direction, achieving a large displacement even in applying a positive voltage (state where a positive field is applied), for normal drive, and allowing the use of a general-purpose driving IC, to provide a method of manufacturing the same film, to provide a piezoelectric element using the same film, and to provide a liquid discharge device using the same element.

The piezoelectric film includes lead and is formed in the thickness of ≥3 μm resulting in d31(+)/d31(-)>0.5 and d31(+)>100 pm/V, and a preferable quantity of lead added to the piezoelectric film is ≤1.03. The values d31(+) and d31(-) are respectively piezoelectric constants of the piezoelectric film measured when an upper electrode and a lower electrode are formed respectively on the piezoelectric film and a positive voltage and a negative voltage are applied to the upper electrode.

COPYRIGHT: (C)2010,JPO&INPIT


Inventors:
Shinkawa Takami
Application Number:
JP2008253263A
Publication Date:
April 21, 2010
Filing Date:
September 30, 2008
Export Citation:
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Assignee:
FUJIFILM Corporation
International Classes:
H01L21/8246; B41J2/045; B41J2/055; B41J2/135; B41J2/14; C04B35/49; C04B35/491; C23C14/08; H01L27/105; H01L41/09; H01L41/18; H01L41/257; H01L41/316; H01L41/39
Domestic Patent References:
JP2008218547A
JP2009117592A
JP2009065049A
JP2009071295A
JP2008306164A
JP2007096248A
JP2005333105A
JP2001021052A
Attorney, Agent or Firm:
Nozomi Watanabe
Haruko Sanwa