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Patent Searching and Data


Title:
基板温度調整装置および基板温度調整方法
Document Type and Number:
Japanese Patent JP4454243
Kind Code:
B2
Inventors:
稲葉 伸一
杉 恭輔
Application Number:
JP2003095455A
Publication Date:
April 21, 2010
Filing Date:
March 31, 2003
Export Citation:
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Assignee:
キヤノンアネルバ株式会社
International Classes:
F27D21/00; H01L21/205; F27B5/18; F27D9/00; H01L21/02
Domestic Patent References:
JP2003037073A
JP2001196324A
JP11506821A
JP2002500822A
JP9126913A
JP5102044A
JP2003077851A
JP6124955A
JP10172919A
JP9129750A
Foreign References:
WO1996041109A1
Attorney, Agent or Firm:
田宮 寛祉