Title:
基板キャリヤを懸架するためのオーバーヘッド移送フランジおよび支持体、基板キャリヤの支持方法
Document Type and Number:
Japanese Patent JP4455893
Kind Code:
B2
Abstract:
In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body and an overhead carrier support. The overhead transfer flange has a first side and a second side opposite the first side that is wider than the first side. Numerous other aspects are provided.
Inventors:
Michael Earl Rice
Martin Earl. Elliott
Robert B. Lawrence
Jeffrey C. Hudgens
Eric Andrew Ingleheart
Martin Earl. Elliott
Robert B. Lawrence
Jeffrey C. Hudgens
Eric Andrew Ingleheart
Application Number:
JP2004018830A
Publication Date:
April 21, 2010
Filing Date:
January 27, 2004
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
B65G49/07; H01L21/677; H01L21/68
Domestic Patent References:
| JP2000255969A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yuichi Yamada
Yasuhito Suzuki
Yuichi Yamada
Yasuhito Suzuki