Title:
感光性樹脂組成物、これを用いた感光性樹脂組成物の層及びレジストパターンの製造法
Document Type and Number:
Japanese Patent JP4465566
Kind Code:
B2
Inventors:
Akira
Masayoshi Top
Makoto Shiota
Masayoshi Top
Makoto Shiota
Application Number:
JP2000192883A
Publication Date:
May 19, 2010
Filing Date:
June 27, 2000
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
G03F7/027; C08F2/44; C08F2/50; C08F299/06; C08L33/00; C08L55/00; C08L101/08; C08L101/14; G03F7/032; G03F7/033
Domestic Patent References:
| JP7041708A |
Foreign References:
| WO1998045755A1 |