Title:
試料検査装置、及び、試料検査方法
Document Type and Number:
Japanese Patent JP4467591
Kind Code:
B2
Inventors:
Takuro Nagao
Isomura Hayato
Isomura Hayato
Application Number:
JP2007059499A
Publication Date:
May 26, 2010
Filing Date:
March 09, 2007
Export Citation:
Assignee:
Advanced Mask Inspection Technology Co., Ltd.
International Classes:
G01B11/24; G01N21/956; G03F1/84; G06T1/00
Domestic Patent References:
| JP2006268341A | ||||
| JP2003107669A | ||||
| JP2003098115A |
Attorney, Agent or Firm:
Mitsuyuki Matsuyama
Tetsuma Ikegami
Tetsuma Ikegami