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Title:
熱処理装置および熱処理方法
Document Type and Number:
Japanese Patent JP4468555
Kind Code:
B2
Inventors:
江嶋 睦仁
坂本 浩一
Application Number:
JP2000222051A
Publication Date:
May 26, 2010
Filing Date:
July 24, 2000
Export Citation:
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Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/46; H01L21/205; F27B5/14; F27D11/02; H01L21/22; H01L21/31
Domestic Patent References:
JP9148315A
JP4234119A
Attorney, Agent or Firm:
絹谷 信雄
金坂 憲幸



 
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