Title:
表面弾性波センサー用基板及び表面弾性波センサー
Document Type and Number:
Japanese Patent JP4470590
Kind Code:
B2
Abstract:
To provide a langatate single-crystal substrate having characteristics proper for a sensor and the surface acoustic-wave sensor using the substrate.
In the substrate for the surface acoustic-wave sensor, the piezoelectric-body substrate having a working temperature range of 100°C or higher is used, and formed of a langatate (La
COPYRIGHT: (C)2006,JPO&NCIPI
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Inventors:
Kazutaka Fujiwara
Application Number:
JP2004162285A
Publication Date:
June 02, 2010
Filing Date:
May 31, 2004
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
H01L41/09; H03H9/25; H01L41/18; H03H9/145
Domestic Patent References:
| JP2004150860A | ||||
| JP2000138557A | ||||
| JP2004189543A | ||||
| JP2004189544A |
Other References:
Donald C. Malicha,他3名,Measurements of LGS, LGN, and LGT thermal coefficients of expansion and density,Ultrasonics, Ferroelectrics and Frequency Control,2002年 3月,Volume 49, Issue 3,p.350-p.355
Mauricio Pereira da Cunha,他3名,Surface and pseudo surface acoustic waves in langatate: predictions and measurements,Ultrasonics, Ferroelectrics and Frequency Control,2002年 9月,Volume 49, Issue 9,p.1291-p.1299
Mauricio Pereira da Cunha,他3名,Surface and pseudo surface acoustic waves in langatate: predictions and measurements,Ultrasonics, Ferroelectrics and Frequency Control,2002年 9月,Volume 49, Issue 9,p.1291-p.1299
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Akihiko Eguchi
Yasuhiko Murayama
Noriko Yanai
Tadashi Takahashi
Masakazu Aoyama
Akihiko Eguchi
Yasuhiko Murayama
Noriko Yanai