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Title:
プラズマ処理装置
Document Type and Number:
Japanese Patent JP4470970
Kind Code:
B2
Inventors:
高橋 俊樹
Application Number:
JP2007200114A
Publication Date:
June 02, 2010
Filing Date:
July 31, 2007
Export Citation:
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Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/31; C23C16/505
Domestic Patent References:
JP6077138A
JP2002299329A
Attorney, Agent or Firm:
浅井 章弘



 
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