Title:
基板処理装置及び基板の受け渡し位置の調整方法
Document Type and Number:
Japanese Patent JP4473827
Kind Code:
B2
Inventors:
Nobuaki Matsuoka
Application Number:
JP2006046697A
Publication Date:
June 02, 2010
Filing Date:
February 23, 2006
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/68
Domestic Patent References:
| JP11254359A | ||||
| JP5178407A | ||||
| JP2004160613A | ||||
| JP2005019963A |
Attorney, Agent or Firm:
Toshio Inoue