To provide a method capable of performing X-ray detection remarkably efficiently with little restriction of position relation between a detector and a sample in comparison with a conventional characteristic X-ray detection method wherein an X-ray detector is installed in front of the sample, namely, on the same side as a beam light source based on the sample surface entered by a primary beam.
This method for detecting the characteristic X-ray generated from the sample by impact of the primary beam such as an X-ray, an electron beam or an ion beam is characterized by arranging the X-ray detector on the back of the sample arranged on the optical axis elongation based on the beam light source, and installing a damper material for preventing transmission of the incident primary beam into an X-ray detection element on the front surface of the detector based on the beam light source.
COPYRIGHT: (C)2005,JPO&NCIPI
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TAKURO SAKAI, TOMIHIRO KAMIYA, MASAKAZU OIKAWA, TAKAHIRO SATO, AKIRA TANAKA and KAIZO ISHII,"DEVELOPMENT OF IN-AIR MICRO-PIXE ANALYSIS AND DATA SHARING SYSTEMS IN JAERI TAKASAKI",International Journal of PIXE,World Scientific Publishing Company,2000年,第10巻、第3&4号,p.91-95
Shinjiro Ono
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Koji Hirayama
Shurin Sakurai
Fujihiro Kanda
Hideo Tanaka
Shinya Hosokawa
Norihiro Fukasawa