Title:
試料作成装置
Document Type and Number:
Japanese Patent JP4483957
Kind Code:
B2
Abstract:
To simplify steps through collecting a sample piece for a TEM or SEM observation from an original sample up to molding it and setting an observation holder, and carry out the steps consistently in a sample treatment chamber.
The sample piece 15 is molded by clipping the original sample 5 at a desired position by using a focused ion beam irradiation optics 2. Next, the sample piece 15 is collected by a detachable sample piece probe 7, and the sample piece probe 7 is moved to an observation-use sample holder 10, and then the observation-use sample holder 10 is taken out of the sample treatment chamber 1 by using an airlock mechanism, thereby preparing the sample simply and quickly.
COPYRIGHT: (C)2008,JPO&INPIT
Inventors:
Yamamoto Ritsuharu
Kaoru Umemura
Satoshi Tomimatsu
Matsushima Masaru
Kaoru Umemura
Satoshi Tomimatsu
Matsushima Masaru
Application Number:
JP2008057169A
Publication Date:
June 16, 2010
Filing Date:
March 07, 2008
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01N1/28; G01N1/32; H01J37/20
Domestic Patent References:
| JP5052721A | ||||
| JP7209128A | ||||
| JP10221234A | ||||
| JP10199466A | ||||
| JP64044555U | ||||
| JP3076122A | ||||
| JP2294644A |
Attorney, Agent or Firm:
Manabu Inoue