Title:
半導体試験装置
Document Type and Number:
Japanese Patent JP4486718
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a semiconductor test device measuring characteristics especially timing at a cross point of a DUT having a differential output with high accuracy and generality. SOLUTION: This semiconductor test device compares voltages by voltage comparators CP1, CP2 applying a test signal to DUT 10 for receiving the voltage of its answer signal to compare the answer signal and a high level reference voltage, and voltage comparators CP1, CP2 comparing the answer signal and a low level reference voltage during a strobe pulse period, and applies output logic signals of the voltage comparators CP1, CP2 to a pattern comparator for comparing the logic signals with an expected value in the patterns to check the quality of the logic signals and test the timing. The test device is also provided with a differential output measuring circuit 20 supplying a differential output signal of the DUT 10 to a reference voltage input terminal of either one of the comparators CP1, CP2 for measuring the timing at a cross point of a differential pair signals.
Inventors:
Masahiko Yamabe
Application Number:
JP11337199A
Publication Date:
June 23, 2010
Filing Date:
April 21, 1999
Export Citation:
Assignee:
Advantest Corporation
International Classes:
G01R31/319; G01R31/28
Domestic Patent References:
| JP5052780U | ||||
| JP57205077U | ||||
| JP3061722U |
Attorney, Agent or Firm:
Longhua International Patent Service Corporation