Title:
半導体装置の製造方法
Document Type and Number:
Japanese Patent JP4492919
Kind Code:
B2
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Inventors:
Tone River Hill
Ryohei Kitao
Hidenobu Miyamoto
Ryohei Kitao
Hidenobu Miyamoto
Application Number:
JP2003140277A
Publication Date:
June 30, 2010
Filing Date:
May 19, 2003
Export Citation:
Assignee:
Renesas Electronics Corporation
International Classes:
H01L21/3205; H01L21/768; H01L21/306; H01L23/52
Domestic Patent References:
JP2000031089A | ||||
JP11204524A |
Attorney, Agent or Firm:
Keiji Miyamoto