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Patent Searching and Data


Title:
薄膜圧電アクチュエータ
Document Type and Number:
Japanese Patent JP4496091
Kind Code:
B2
Inventors:
川久保 隆
尾原 亮一
小野 富男
長野 利彦
阿部 和秀
西垣 亨彦
佐野 賢也
安本 恭章
Application Number:
JP2005003370A
Publication Date:
July 07, 2010
Filing Date:
January 11, 2005
Export Citation:
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Assignee:
株式会社東芝
International Classes:
H01L41/09; H01G7/06; H01L41/053; H01L41/08; H01L41/18; H01L41/187; H01L41/22; H01L41/29; H01L41/316
Domestic Patent References:
JP9148643A
JP2002191181A
JP2004111939A
Attorney, Agent or Firm:
日向寺 雅彦