Title:
シリコンウェーハの評価方法
Document Type and Number:
Japanese Patent JP4501450
Kind Code:
B2
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Inventors:
Tsuyoshi Otsuki
Tatsuo Abe
Saito Hisayuki
Tatsuo Abe
Saito Hisayuki
Application Number:
JP2004041489A
Publication Date:
July 14, 2010
Filing Date:
February 18, 2004
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
H01L21/66; H01L21/027
Domestic Patent References:
| JP2002359171A | ||||
| JP5166910A | ||||
| JP11097500A | ||||
| JP2003075469A | ||||
| JP2001351843A | ||||
| JP2001083688A |
Attorney, Agent or Firm:
Mikio Yoshimiya