Title:
磁気軸受装置及び該磁気軸受装置を搭載したターボ分子ポンプ
Document Type and Number:
Japanese Patent JP4502667
Kind Code:
B2
Abstract:
Provided are: a magnetic bearing device capable of reducing the costs required for the manufacture, installation, or the like of a turbo molecular pump by reducing the number of elements of an amplifier circuit that drives, through excitation, electromagnets; and a turbo molecular pump with the magnetic bearingdevicemountedthereto. Oneend (151a) of an electromagnet coil (151) constituting each of electromagnets (104, 105, 106A, and 106B) is connected to a common node (C). The common node (C) is connected to a switch circuit (280) composed of a transistor (281) and a diode (285). The other end (151b) of the electromagnet coil (151) is connected to an amplifier circuit (250) composed of a transistor (261) and a diode (265).
Inventors:
Toshiaki Kawashima
Application Number:
JP2004060047A
Publication Date:
July 14, 2010
Filing Date:
March 04, 2004
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04; F16C39/06; F16C32/04; H03F3/217
Domestic Patent References:
| JP2003013954A | ||||
| JP2003172353A | ||||
| JP2003172354A | ||||
| JP2003139136A | ||||
| JP6153479A | ||||
| JP10070865A | ||||
| JP8270651A | ||||
| JP2004301322A |
Attorney, Agent or Firm:
Masatoshi Shiina