Title:
位置を測定しかつ案内誤差を算出する装置
Document Type and Number:
Japanese Patent JP4503803
Kind Code:
B2
Abstract:
Device has a position scale (10) with graduation divisions (11.1, 11.2) and guide error scales (12a, 12b) arranged perpendicularly to the position scale. Combined position and guide error scanning units (20, 30) are arranged above the scales so that they move relative to the scales. A common light source is used for scanning both scales.
Inventors:
Elwin Syupanner
Application Number:
JP2000276659A
Publication Date:
July 14, 2010
Filing Date:
September 12, 2000
Export Citation:
Assignee:
DR. JOHANNES HEIDENHAIN GESELLSCHAFT MIT BESCHRANKTER HAFTUNG
International Classes:
G01B11/00; G01D5/347; G01B5/00; G01B11/30; G01D5/38; G02B5/18
Domestic Patent References:
| JP7324948A | ||||
| JP62133306A | ||||
| JP58113805A |
Foreign References:
| EP0660085A1 |
Attorney, Agent or Firm:
Mitsufumi Esaki
Tsuneo Mihara
Okumura Yoshimichi
Blacksmith
Tsuneo Mihara
Okumura Yoshimichi
Blacksmith