Title:
クリーンストッカー
Document Type and Number:
Japanese Patent JP4511773
Kind Code:
B2
Inventors:
Kiyoshi Kanno
Takuji Shimizu
Hiroshi Hirata
Takuji Shimizu
Hiroshi Hirata
Application Number:
JP2001291740A
Publication Date:
July 28, 2010
Filing Date:
September 25, 2001
Export Citation:
Assignee:
Panasonic Environmental Engineering Co., Ltd.
International Classes:
H01L21/673; H01L21/68
Domestic Patent References:
| JP2001244322A | ||||
| JP11340109A | ||||
| JP10178077A | ||||
| JP6037213A | ||||
| JP10154750A |
Foreign References:
| WO1998042783A1 |
Attorney, Agent or Firm:
Hidehiko Okada
Tetsuo Fukuda
Toshiyuki Ikeda
Tetsuyuki Iwata
Atsuko Nakamura
Tetsuo Fukuda
Toshiyuki Ikeda
Tetsuyuki Iwata
Atsuko Nakamura