Title:
基板搬送装置および基板処理装置
Document Type and Number:
Japanese Patent JP4515165
Kind Code:
B2
Inventors:
Hiroyuki Kitazawa
Minako Ando
Minako Ando
Application Number:
JP2004182600A
Publication Date:
July 28, 2010
Filing Date:
June 21, 2004
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/68; B65G49/06; H01L21/027; H01L21/677
Domestic Patent References:
| JP2002261143A | ||||
| JP59170517U | ||||
| JP5004709A | ||||
| JP63225009A | ||||
| JP4260523A | ||||
| JP2005347614A |
Foreign References:
| WO2000068118A1 |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita