To provide a small-sized tuning fork oscillating gyroscope superior in processing precision, mass productivity, and having less irregularity of characteristics.
The tuning fork piezoelectric oscillating gyroscope is composed of: a tuning fork piezoelectric oscillator 15 comprising an SOI substrate providing an embedded oxide film layer 5 on a silicon support layer 6 and a silicon activated layer 13 in order, and a piezoelectric monocrystal 14 joined on the silicon activated layer 13, having two leg parts 2 and 3 formed by removing a part of the piezoelectric monocrystal 14, the silicon activated layer 13 and the embedded oxide film layer 5, supported on the silicon support layer 6 through the embedded oxide film layer 5 and comprising the piezoelectric monocrystal 14 and the silicon activated layer 13; drive electrodes 8 and 10, detection electrodes 7 and 11 and a reference potential electrode 9 formed on the piezoelectric monocrystal 14; and a signal processing circuit 12 formed on a part not joining the piezoelectric monocrystal 14 on the silicon activated layer 13.
COPYRIGHT: (C)2006,JPO&NCIPI
Koichi Nara
Mitsuharu Chiba
Mizuno Go
Akiko Oshima
| JP9126783A | ||||
| JP8159776A | ||||
| JP11257965A | ||||
| JP9330892A |