Title:
半導体装置
Document Type and Number:
Japanese Patent JP4520479
Kind Code:
B2
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Inventors:
Junichi Hikita
Isamu Nishimura
Isamu Nishimura
Application Number:
JP2007084526A
Publication Date:
August 04, 2010
Filing Date:
March 28, 2007
Export Citation:
Assignee:
ROHM Co., Ltd.
International Classes:
H01L21/60; H01L21/3205; H01L23/52; H01L25/065; H01L25/07; H01L25/18
Domestic Patent References:
JP8213427A | ||||
JP63156348A | ||||
JP62209845A | ||||
JP49036789B1 |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Mio Kawasaki