Title:
スリット幅調整装置およびこれを備えた顕微鏡レーザリペア装置
Document Type and Number:
Japanese Patent JP4520918
Kind Code:
B2
Inventors:
Shoichi Tanaka
Takao Kawabe
Takao Kawabe
Application Number:
JP2005234281A
Publication Date:
August 11, 2010
Filing Date:
August 12, 2005
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G02B26/02
Domestic Patent References:
| JP63141916U | ||||
| JP2001208987A | ||||
| JP62168416U | ||||
| JP2003205376A | ||||
| JP2000010152A |
Foreign References:
| WO2004104647A1 |
Attorney, Agent or Firm:
Intellectual Property Office
Kinoshita Minoru
Kanji Nakayama
Tsuyoshi Ishizaki
Kinoshita Minoru
Kanji Nakayama
Tsuyoshi Ishizaki