Title:
ヒータ用電極及び半導体製造装置
Document Type and Number:
Japanese Patent JP4521083
Kind Code:
B2
Inventors:
Akira Sato
Hiroyuki Ishida
Yoshitomo Takahashi
Hiroyuki Ishida
Yoshitomo Takahashi
Application Number:
JP2000036805A
Publication Date:
August 11, 2010
Filing Date:
February 15, 2000
Export Citation:
Assignee:
Bridgestone Corporation
International Classes:
H05B3/03
Domestic Patent References:
| JP6041090U | ||||
| JP10189227A | ||||
| JP50000543U | ||||
| JP7161725A | ||||
| JP11354260A | ||||
| JP26006242B1 |
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Katsuichi Nishimoto
Hiroshi Fukuda
Kato Kazunori
Katsuichi Nishimoto
Hiroshi Fukuda