Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
石英ガラス製ウェーハ支持治具及びその製造方法
Document Type and Number:
Japanese Patent JP4526683
Kind Code:
B2
Inventors:
斎藤 実
今野 利昭
Application Number:
JP2000334022A
Publication Date:
August 18, 2010
Filing Date:
October 31, 2000
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
株式会社山形信越石英
信越石英株式会社
International Classes:
C03B20/00; H01L21/683; C23C16/44; C23C16/458; F27D5/00; H01L21/205; H01L21/687
Domestic Patent References:
JP2122431U
JP9260296A
JP1238023A
JP10256161A
JP11260746A
JP11243064A
JP7161654A
JP2001508599A
JP10321543A
Attorney, Agent or Firm:
石原 詔二
石原 進介



 
Previous Patent: JPS4526682

Next Patent: JPS4526684