Title:
石英ガラス製ウェーハ支持治具及びその製造方法
Document Type and Number:
Japanese Patent JP4526683
Kind Code:
B2
Abstract:
An object of the present invention is to provide a novel wafer support jig and a process for producing the same, said wafer support jig capable of considerably suppressing the generation of particles in the wafer heat treatment process, e.g., a CVD process, during the production of semiconductors. In order to solve the problems a quartz glass wafer support jig is suggested comprising a plurality of support pillars having provided thereto a plurality of ring-shaped support plates for mounting thereon the wafers, said support plates being superposed one after another with a predetermined distance taken between the neighboring plates in the vertical direction, a quartz glass wafer support jig characterized in that it comprises said ring-shaped support plates each having its upper and lower surfaces precisely polished and each having provided with chamfered portions formed by chamfering the upper and lower edge portions of the outer and inner peripheries thereof.
Inventors:
Minoru Saito
Toshiaki Konno
Toshiaki Konno
Application Number:
JP2000334022A
Publication Date:
August 18, 2010
Filing Date:
October 31, 2000
Export Citation:
Assignee:
Yamagata Shinetsu Quartz Co., Ltd.
Shin-Etsu Quartz Products Co., Ltd.
Shin-Etsu Quartz Products Co., Ltd.
International Classes:
C03B20/00; C23C16/44; H01L21/683; C23C16/458; F27D5/00; H01L21/205; H01L21/687
Domestic Patent References:
| JP2122431U | ||||
| JP9260296A | ||||
| JP1238023A | ||||
| JP10256161A | ||||
| JP11260746A | ||||
| JP11243064A | ||||
| JP7161654A | ||||
| JP2001508599A | ||||
| JP10321543A |
Attorney, Agent or Firm:
Shoji Ishihara
Shinsuke Ishihara
Shinsuke Ishihara