Title:
光学検査モジュール、及び統合プロセス工具内で基板上の粒子及び欠陥を検出するための方法
Document Type and Number:
Japanese Patent JP4527205
Kind Code:
B2
Abstract:
An optical inspection module detects defects on an active surface of a substrate in an integrated process tool system. The optical inspection module includes an enclosure, a substrate holder, a light source, a light beam path, a lens and a photodetector array. The light source has a light beam port. The light beam path extends from the light beam port to the substrate holder and has a grazing angle of incidence with respect to the active surface of the substrate. The light beam path illuminates substantially the entire active surface. The lens is oriented to collect non-secularly reflected light scattered from the light beam path by any defects on the active surface. The photodetector array has a plurality of pixels which are positioned within a focal plane of the lens. Each pixel corresponds to an area on the active surface, and the plurality of pixels together form a field of view that covers substantially the entire active surface.
Inventors:
Kinney, Patrick Dee
Rao, Nagara Phi
Rao, Nagara Phi
Application Number:
JP54189498A
Publication Date:
August 18, 2010
Filing Date:
March 30, 1998
Export Citation:
Assignee:
Real Time Metrology, Inc.
International Classes:
G01N21/956; G01N21/94; G06T1/00; H01L21/66
Domestic Patent References:
| JP8075661A | ||||
| JP5322781A | ||||
| JP10206341A |
Foreign References:
| JB04035025B2 |
Attorney, Agent or Firm:
Shinjiro Ono
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Akutsu Katsuhisa
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Akutsu Katsuhisa