Title:
シリコン単結晶の製造方法
Document Type and Number:
Japanese Patent JP4529976
Kind Code:
B2
Inventors:
Yoshihiro Kodama
Kazuyuki Hirahara
Kazuyuki Hirahara
Application Number:
JP2006528465A
Publication Date:
August 25, 2010
Filing Date:
June 13, 2005
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
C30B29/06; C30B13/12
Domestic Patent References:
| JPS475868A | ||||
| JP2002134518A | 2002-05-10 | |||
| JPH0365586A | 1991-03-20 | |||
| JP2002226295A | 2002-08-14 |
Attorney, Agent or Firm:
Mikio Yoshimiya