ポリマー膜の形成方法

Title:

ポリマー膜の形成方法

Document Type and Number:

Japanese Patent JP4530130

Kind Code:

B2

More Like This:

JP3353609	METHOD FOR PURIFYING POLYSILANE COMPOUND
JP2853546	PRODUCTION OF PHTHALOCYANINE RING-CONTAINING COMPOUND
JPH07309950	ORGANOSILICON POLYMER AND ITS PRODUCTION

Inventors:

K. Nakagawa
Masahiro Akiyama
Takahiko Kurosawa
Atsushi Shioda

Application Number:

JP2004009207A

Publication Date:

August 25, 2010

Filing Date:

January 16, 2004

Export Citation:

Assignee:

JSR CORPORATION

International Classes:

C08G77/48; C09D183/14; C08G77/04; C08G77/60; H01L21/312

Domestic Patent References:

Attorney, Agent or Firm:

Mitsue Obuchi
Yukio Fuse
Inoue Ichi

Previous Patent: JPS4530129

Next Patent: 熱分解ガスファンのインペラブロー装置