Title:
表面検査装置
Document Type and Number:
Japanese Patent JP4531447
Kind Code:
B2
Abstract:
A surface inspection apparatus of the present invention includes an irradiation optical unit having a multibeam irradiation optical unit for converging and irradiating multiple beams upon a surface of an object to be inspected; a detector which has a light-condensing optical unit including light-sensitive elements for respectively receiving the multiple beams reflected by the surface of the inspecting object; and a processor which obtains a plane-coordinate-position of a position to be irradiated and detected at a reference height position based on a difference between light-receiving reference positions of each of the light-sensitive elements when assumed that the irradiated and detected position of the inspecting object is at the reference height position and actual light-receiving positions of each of the light-sensitive elements, according to a result of analysis and process of surface state information.
Inventors:
Kazuhiro Miyakawa
Yoichiro Iwa
Akihiko Sekine
Yoichiro Iwa
Akihiko Sekine
Application Number:
JP2004165671A
Publication Date:
August 25, 2010
Filing Date:
June 03, 2004
Export Citation:
Assignee:
Topcon Co., Ltd.
International Classes:
G01B11/00; G01B11/30; G01B11/02; G01B11/16; G01N21/88; G01N21/95; G01N21/956
Domestic Patent References:
| JP56158904A | ||||
| JP11153549A |
Attorney, Agent or Firm:
Tamio Nishiwaki