Title:
真空制御システム
Document Type and Number:
Japanese Patent JP4533614
Kind Code:
B2
Abstract:
There is provided a vacuum control system for allowing the degree of vacuum in a vacuum vessel to be kept constant, effectively and accurately removing vaporized components degassed into the vacuum vessel through a gas permeation diaphragm by stably introducing a very small amount of air into a vacuum exhaust path, and thus operating stably, and a vacuum degassing apparatus employing the vacuum control system. The vacuum control system controls the rotatory power of a DC brushless motor 3, continuously controls displacement of a vacuum pump 1, and thus keeps the degree of vacuum in a vacuum vessel constant, by decompressing the inside of the vacuum vessel 1 using an exhaust vacuum pump 2 which operates with the DC brushless motor 3, monitoring the inside pressure of the vacuum vessel using a pressure sensor 5, and controlling a voltage applied to the DC brushless motor on the basis of an output signal resulting from measurement of the inside pressure of the vacuum vessel by the pressure sensor.
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Inventors:
Yoshio Ishii
Koji Tanemura
Toshihiko Matsumoto
Kozo Shirato
Koji Tanemura
Toshihiko Matsumoto
Kozo Shirato
Application Number:
JP2003352286A
Publication Date:
September 01, 2010
Filing Date:
October 10, 2003
Export Citation:
Assignee:
Earl Co., Ltd.
International Classes:
F04B49/06; A61M1/00; B01D19/00; B01D61/00; F04B37/14; G05D16/04; G05D16/20
Domestic Patent References:
| JP5096104A | ||||
| JP2001329963A | ||||
| JP11069867A | ||||
| JP2001178168A | ||||
| JP2003139055A | ||||
| JP2000162100A | ||||
| JP1182787A |
Attorney, Agent or Firm:
Eichi International Patent Office